Fabrication of Fresnel zone plates for hard X-rays
نویسندگان
چکیده
A method to fabricate gold structures with high aspect ratio is presented. Fresnel zone plates with an outermost zone width of 100 nm and structures of 1 lm height are fabricated. Preliminary focusing results at an X-ray energy of 8 keV are presented and ways to improve the zone plate parameters are discussed. 2007 Elsevier B.V. All rights reserved.
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